Czasopismo | ELEKTRONIKA - KONSTRUKCJE, TECHNOLOGIE, ZASTOSOWANIA | Rocznik 2012 - zeszyt 4

Miniaturized arms for three-dimensional thick-film thermoelectric microgenerator

Piotr Markowski

nr katalogowy: 67028

When two different metals are connected by their ends and there is a temperature difference between the junctions the electric current flows into the circuit. This kind of structure is called thermocouple and it can be used to electrical power generation. Output voltage and power can be multiplied if a number of thermocouples are electrically connected in series. At the same time all “cold" junction should have approximately the same temperature - lower than the temperature of "hot" joints (thermocouples should be thermally connected in parallel). Such a structure is called thermopile. Thermopiles produce “green" energy and can be used as an alternative power sources for microsystems and low-power electronic micro-circuits [1, 2]. Their dimensions should be small - comparable with dimensions of powered systems. It is the reason why miniaturization of such generators is important. Fabrication process Two ways of fabrication of thermopiles are presented. First one bases on precise screen-printing only. Ag and Ni or PdAg pastes were used. They were printed using AUREL VS1520 Fine Line Screen Stencil Printer. In the second method precise screen-printing and photoimageable inks technique were combined. Ag-based photosensitive paste was used to fabricate first thermocouples’ arms. Second arms were precisely screen printed between Ag paths. As a substrate DP951 unfired ceramic foil was used in both cases. LTCC (Low Temperature Cofired Ceramic) technique allows fabrication of microelectronic multilayer structures [3]. It can be exploited to construct stack of thermopiles - a number of thermopiles fabricated on single foils are connected in one, multilayer stack (“sandwich" structure). In the result the output parameters (like generated voltage or electrical power) are multiplied. DuPont ceramic was chosen because of its good compatibility with used thick-film pastes. Precise printing - the "A" type structure[...]

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2012-4

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