Czasopismo | ELEKTRONIKA - KONSTRUKCJE, TECHNOLOGIE, ZASTOSOWANIA | Rocznik 2011 - zeszyt 8

Porous silicon - obtainig, properties and applications

nr katalogowy: 61937

Porous silicon (PS) is formed by the electrochemical etching of silicon (Si) in an fluorhidric acid (HF) solution. For over 40 years the formation process and the properties of porous silicon have been studied. It has been shown that PS exhibits a sponge-like microstructure, which depends on the process formation parameters. Several models have been developed to explain the influence of the anodization parameters like current density or HF concentration on the microstructure. In addition, the dependence of the microstructure on the type of doping and the doping concentration has been investigated. It was proposed that the properties of a sample are more accurately predicted if the pore size and its distribution within the sample can be obtained. Therefore, porous silicon has been divided into three categories based on the size of its pores: macroporous - pore size is larger than 50 nm, mesoporous - pore size is between 2 and 50 nm, and microporous when pore size are less than 2 nm [1]. The physical properties of PS layers are closely related to their microstructure. During the years, various properties of PS layers were in the attention of the researchers. One of the most exciting properties was related to light emission of the porous layers and a large number of papers was published to understand the optical properties of PS and the physical mechanism for the luminescence emission efficiency. It was also observed that PS is a very fragile and highly reactive material, many of its properties becoming age dependent and unstable, and for this reason a special attention has been dedicated to achieve appropriate post-anodisation treatments. In the last years, the PS biocompatibility was demonstrated and specific applications in biomedical field have been developed. Also, it has been showed that porous silicon can be used as substrate for carbonaceous nanostructured materials for field emission devices, the research being focuse[...]

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