Czasopismo | INŻYNIERIA MATERIAŁOWA | Rocznik 2010 - zeszyt 3

Microstructure and hardness of magnetron sputtering (Cr, Si)N coatings with up to 30 at. % Si

nr katalogowy: 52703

TiN coatings extending the cutting tools lifetime were praised for their very good adhesion and hardness exceeding those of high speed steel or even cemented carbides [1, 2]. However, their limited high temperature resistance for oxidation during high speed machining turned interest toward those sandwiched with CrN or multi-layer coatings like TiN/VN or TiN/NbN [3, 4]. The hardness of the latter exceeds those characteristic for individual layers due to coherency strains, while vanadium or niobium nitrides prevent them from premature oxidation [3, 4]. In most cases the TiN is deposited first to gain advantage of its excellent adhesion to most steel substrates. Unfortunately the deposition process of multilayer coatings is a complicated one and in consequence rarely economically acceptable. Therefore, as an alternative, a nanocomposite crystalline-amorphous TiN/Si3N4 coatings were proposed by Veprek et al. [5]. The idea of nanocrystalline-amorphous composites is based on development of shear resistant nanocrystallites of transition-metal nitrides or carbides surrounded by amorphous nitride [5, 6]. The TiN/Si3N4 coatings obtained up to date show large scatter of hardness from ~20 to ~60 GPa being generally well below expectations [7÷11]. The CrN/Si3N4 coatings showed also only moderate hardness increase from 16 characteristic for CrN up to max. ~34 GPa [2]. Even as higher gains were expected from the nanocomposite model rising CrN based coating hardness up to the level characteristic for TiN seems interesting from practical point of view. The further development of these interesting nanocomposite coatings might be achieved only through simultaneous hardness measurements and detail experimental ver[...]

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