Czasopismo | INŻYNIERIA MATERIAŁOWA | Rocznik 2010 - zeszyt 3

Microstructure investigation of thin films SnO2 produced by pulsed laser deposition

Agnieszka Kopia

nr katalogowy: 52695

The domain of gas concentration measurements - that was until recently important primarily in industrial technologies - has become important in atmosphere pollution research and in issues related directly to households (emission of toxic gasses, such as CO, NOx, CH4) [1]. A sensor for detecting and measuring gas concentrations should be characterized by appropriately high sensitivity, selectivity, a short response time and stability. These requirements led to a fast development of research on semiconductor-based gas sensors (Tab. 1). They meet the majority of these requirements and their appeal is additionally due to the simplicity of their structure and low costs of production. In series production, thick-layered sensors based on SnO2 pay the dominant role beside sensors based on sintered ceramic materials. The role of thin-layered technologies has been noticeably growing. Slow abandonment of thick-layered sensors is related to worse utility properties, compared to thin-layered sensors. The data available in the relevant literature show that high thickness of a gas-sensitive material is connected with big grain, which leads to reduction of the resistance of such material, but also to reduction of the active surface, i.e. of the sensitivity. Thick-layered sensors are also characterised by lower selectivity. In case of thin-layered sensors, surface conductivity - highly dependant on their gas environment - has a considerable share in the electric conductivity. In such sensors, the sensitivity and detection threshold are improved and the response time is reduced. Tin dioxide SnO2 is a material that is most often used in thinlayered[...]

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