Czasopismo | INŻYNIERIA MATERIAŁOWA | Rocznik 2014 - zeszyt 2

Structural characterization and properties of M-WO3 (M = Au, Pt) thin films prepared by pulsed laser deposition

nr katalogowy: 84293

A sensor for detecting and measuring gas concentrations should be characterized by appropriately high sensitivity, selectivity, a short response time and stability. These requirements led to a fast development of research on semiconductor-based gas sensors [1, 2]. The tungsten trioxide is the competition to others oxides compositions regarding low costs of production and high sensitivity in the presence of H2S, NOx, SO2. However, sensitivity of the sensor, its stability and working time highly depend on microstructure, thickness of film, grain size and grade of specific surface [3, 4]. M. Bendahan et al. [5] showed in their investigations, that using magnetron sputtering it is possible to obtain WO3 films sensitive to O3, however, the sensitivity depends on working temperature. WO3, Ag-WO3, Au-WO3 and Pt-WO3 films produced by means of magnetron sputtering method were investigated in the area of sensitivity and selectivity by M. Stankova et al. [6]. Authors showed that WO3 films coated with z 3÷4 nm layer of Au or Ag are sensitive to presence of H2S in CO2 at temperature T = 260°C, but not reacting when SO2 is present in CO2. F. Mitsuga et al. [7] produced WO3 films using laser ablation method and showed that the highest sensitivity to the presence of NOx presented films in the temperature 200°C. Investigations into the sensitivity of WO3, Au-WO3 and Pt-WO3 films produced with PLD method were done by H. Kawasaki et al. [8]. Authors observed sensitivity four times higher for Au-WO3 and Pt-WO3 films regarding pure WO3 at the temperature 300°C. In all the cases investigated WO3 films characterized high sensitivity to various gases at different temperature. These films properties allowed the temperature modulation and direct WO3 films to detection of specified gas to be applied. In our previous investigation [9][...]

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