Czasopismo | INŻYNIERIA MATERIAŁOWA | Rocznik 2016 - zeszyt 4

Studies of thermal stability of a-C:H:Si coatings produced by radio-frequency plasma assisted chemical vapour deposition (RF-PACVD) method

10.15199/28.2016.4.5

nr katalogowy: 100290
10.15199/28.2016.4.5

In this work the thermal stability of silicon-doped diamond-like carbon (DLC) films was investigated. The studied coatings were produced by radio-frequency plasma assisted chemical vapour deposition (RF-PACVD) method with use of tetramethylsilane (TMS) as a silicon precursor. As-deposited Si-DLC coatings with three different silicon concentrations were annealed at 400°C, 500°C, and 600°C for 1 hour in air atmosphere. For comparison DLC coatings were also examined. It has been shown that the level of disorder of Si-DLC increases with the increase of silicon concentration. Silicon admixture improves the thermal stability of Si-DLC coatings by slowing down and delaying the graphitization processes compared to the undoped DLC films. Furthermore, an increase in hardness of the Si-DLC coatings annealed at the temperature of 400°C has been observed. The DLC and Si-DLC coatings with the lowest Si concentration annealed at 500°C, and all of the coatings annealed at 600°C have been completely degraded. The coatings with the highest concentration of silicon that have stood the annealing process at 500°C have demonstrated a high degree of graphitization and degradation, manifesting itself in the lowest mechanical properties and a significant reduction in their thickness. Key words: thermal stability, silicon doping, DLC films.1. INTRODUCTION Diamond-like carbon (DLC) films are characterized by many unique properties. These include high biocompatibility [1], high hardness [2], low coefficient of friction, [3, 4] good anti-wear [4] and anti-corrosion [5] characteristics. Hence, these films are commonly used as protective coatings in automotive industry, magnetic data storage, machining tools and biomedical applications [1÷3, 6]. However, DLC coatings have several known disadvantages. One of them, severely limiting their large scale application possibilities is the low thermal stability at high working temperature. It has been reported that DLC coating[...]

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