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Suspended beams fabricated on GaAs substrates

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In the last decade an increasing interest in the fabrication of micromechanical structures based on III-V materials has been observed [1,2]. The most attractive feature of GaAs micromachining is that it allows monolithic integration of mechanical structure and active optical devices. The idea of suspended beam fabrication on GaAs substrate by anisotropic etching results from zinc blende stru[...]

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