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Imaging internal defects in thyristor structures

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An aim of investigation described in the paper was imaging internal defects in layered structures silicon-aluminum-molybdenum with the help of different measuring techniques. One of the reasons of forming defects in an area of bonded layers is poor quality of thermocompression of silicon to molybdenum [1]. The quality of thermocompression and properties of the bonding area determine thermal [...]

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