A sensor for detecting and measuring gas concentrations should be
characterized by appropriately high sensitivity, selectivity, a short
response time and stability. These requirements led to a fast
development of research on semiconductor-based gas sensors
[1, 2]. The tungsten trioxide is the competition to others oxides
compositions regarding low costs of production and high
sensitivity in the presence of H2S, NOx, SO2. However, sensitivity
of the sensor, its stability and working time highly depend on
microstructure, thickness of film, grain size and grade of specific
surface [3, 4]. M. Bendahan et al. [5] showed in their investigations,
that using magnetron sputtering it is possible to obtain
WO3 films sensitive to O3, however, the sensitivity depends on
working temperature. WO3, Ag-WO3, Au-WO3 and Pt-WO3 films
produced by means of magnetron sputtering method were investigated
in the area of sensitivity and selectivity by M. Stankova et
al. [6]. Authors showed that WO3 films coated with z 3÷4 nm
layer of Au or Ag are sensitive to presence of H2S in CO2 at
temperature T = 260°C, but not reacting when SO2 is present in
CO2. F. Mitsuga et al. [7] produced WO3 films using laser ablation
method and showed that the highest sensitivity to the presence of
NOx presented films in the temperature 200°C. Investigations into
the sensitivity of WO3, Au-WO3 and Pt-WO3 films produced with
PLD method were done by H. Kawasaki et al. [8]. Authors
observed sensitivity four times higher for Au-WO3 and Pt-WO3
films regarding pure WO3 at the temperature 300°C. In all the
cases investigated WO3 films characterized high sensitivity to
various gases at different temperature. These films properties
allowed the temperature modulation and direct WO3 films to
detection of specified gas to be applied. In our previous
investigation [9]
[...]




Metoda płatności: Płatności elektroniczne (karta kredytowa, przelew elektroniczny) | |
Dostęp do publikacji (format pdf): 6.00 zł
|
|
Dostęp do Wirtualnej Czytelni - archiwalne e-zeszyty czasopisma (format swf) - 1h: 24.60 zł | |
Dostęp do Wirtualnej Czytelni - archiwalne e-zeszyty czasopisma (format swf) - 4h: 43.05 zł | |
Dostęp do Wirtualnej Czytelni - archiwalne e-zeszyty czasopisma (format swf) - 12h: 73.80 zł | |